The Begbroke Cleanroom provides 150m2 of class 10,000 space housing a wide range of newly purchased processing equipment. Facilities include:
- 18m2 yellow area for photolithography including a mask aligner capable of processing substrates up to 6inches.
- Thermal and e-beam evaporators.
- Reactive ion etching and PECVD.
- Rapid thermal annealer.
- A Keithly Instruments based measurement and testing suite.
Contact Professor Sebastian Bonilla. Also see the Cleanroom Website.